Vacuum Technology
Vacuum Technology is one of the critical processes in the Semiconductor Industry.
Turbo Pump, Diffusion Pump and Cryo pump are most likely commonly used in this field.
Different hardware will give different effect. Using Ion-gauge or Penning gauge? Why pumping time so long? Is it out gas? De-gas or regeneration required? A lot of questions need to solve?
Our service team member has the proper training in the Preiffer and had sound experience in the vacuum technology that can help.
Our Vacuum fine leak detector can help in finding any leakage in vacuum chamber.
Modification done on the Client’s machine (Varian 350D Implanter):
The performance of the original fore line valve from Varian is not good enough. We replaced them with new valves. The difference between them is as below:
Before Modification
Original Varian valve, valve welded together with the piping together.
Varian valve fitted with cryo pump
Original valve comes with Copper bellow The life time for the bellow is shorter because it is made of copper. It takes longer time to replace the O-ring or bellows if there is any vacuum leak. Therefore, it has longer downtime. The total downtime cost and material cost is higher.
After Modification
New valve, individual part, easily to install and replaced.
New valve fitted with cryo pump
New valve comes with Stainless steel bellow The life time for this bellow is longer because it is made of stainless steel. It has shorter downtime because it can replace the valve completely in a few minutes. The bellow can be replaced off-line. The total downtime cost and material cost is lowered.